Is the Future of Moore's Law in a Particle Accelerator?
|
Summary
KEK researchers in Japan are developing a particle accelerator-driven free-electron laser (FEL) to revolutionize EUV lithography in semiconductor manufacturing, promising more powerful EUV light and reduced operational costs for advanced chipmaking.
IEEE Spectrum
Read the Full Article
The dedicated team at Semiconductor Packaging News has provided this summary for your convenience.
|
|
|
|
