Reproducibility and maintaining strict quality control throughout the entire wafer manufacturing process are top priorities
in the semiconductor industry. Hence, a stable and highly accurate liquid flow measurement is essential. With the SEMIFLOW flow meter series, the ultrasound specialist SONOTEC has developed metal-free contactless flow meters particularly designed for the requirements in the semiconductor industry – also for hazardous environments.
SEMIFLOW CO.65 Flow Meter
  Contactless flow measurement
  Compact sensor design
  Highest chemical resistance
  Highest accuracy & repeatability
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Visit us and our partner S3 Alliance at our joint booth #B1.907.
November 14 - 17, 2023
Messe Munich
We are looking forward to discuss your project at the show. To arrange a meeting at our booth, please contact us.
Contact us for a meeting
Ultrasonic Clamp-On Flow Sensor
  Highly precise flow measurement
  Contact-free design eliminates risk of contamination
  Use at PFA, PTFE or other hard plastic tubes and pipes
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For Explosion-Proof Areas
  For Zone 1 according to ATEX / IECEx
  Combination of SEMIFLOW CO.66 PI Ex1 Flow Sensor with control gear Barrier Box ST Ex1
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Ultrasonic Bubble Detector
  For deployment in harsh industrial environments
  Non-contact compact sensor architecture with integrated electronics for data processing
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