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The revolutionary NanoResolution Multi-Reflection Suppression™ (MRS) sensor inspects shiny or mirror-like surfaces with sub-micrometer accuracy for features as small as 25µm.
The NanoResolution MRS sensor enables metrology grade accuracy with superior 100% 3D and 2D inspection performance for attaining repeatable and reproducible measurements faster than alternative technologies – with throughput greater than 25 wafers (300mm) per hour.
Learn more about the NanoResolution MRS sensor, one of our featured products at Semicon West.
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