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Press Releases

August 17, 2016

CyberOptics to Show Next-Generation Airborne Particle Sensors at SEMICON Taiwan
CyberOptics Showcases Large Particle Sensing Functionality in Next-Gen Airborne Particle Sensors at SEMICON Taiwan

Advanced APS2 measurement technology incorporates a wider range
of particle sizes in sensors that speeds processes and improve yields

Minneapolis, MN -- CyberOptics® Corporation (NASDAQ: CYBE), a leading global developer and manufacturer of high precision 3D sensing technology solutions, announces it will showcase its next-generation Airborne Particle Sensor technology (APS2), that incorporates large particle sensing capability. Both the WaferSense® and ReticleSense® Airborne Particle Sensors (APS2, APSR and APSRQ) can measure both small and large particles. The new large particle detecting and measurement functionality covers a range of sizes with four bins for particles larger than 2, 5, 10 and 30 microns. Products will be on display at the upcoming SEMICON Taiwan in Taipei, September 7-9, 2016 in booth #200, 4th floor.

CyberOptics' APS2 portfolio speeds equipment set-up and long-term yields in semiconductor fabs by wirelessly monitoring airborne particles in real-time. The next-generation APS2 provides even greater versatility, with the industry-leading accuracy and sensitivity valued by semiconductor fabs and equipment OEMs worldwide.

"We've taken the Best Known Method for wireless particle measurement in semiconductor fabs and made it even better," said Ferris Chen, Director of Sales, CyberOptics, Asia. "We've extended the APS2 technology to include large particle measurement capability in the very same device that our customers use to save time, save expense and improve yields."

At SEMICON Taiwan, CyberOptics will also demonstrate its WaferSense and ReticleSense Auto Multi Sensors (AMS/AMSR) that measure leveling, vibration, and relative humidity (RH) in an all-in-one wireless real-time device. The thin and light form factor enables the AMS to travel through virtually any tool and the AMSR can capture multiple measurements in all locations of the reticle environment. The all-in-one devices are yet another way to increase yield and reduce downtime in semiconductor environments.

About the WaferSense and RetcileSense Line
The WaferSense measurement portfolio including the Auto Leveling System (ALS), the Auto Gapping System (AGS), the Auto Vibration System (AVS), the Auto Teaching System (ATS), the Airborne Particle Sensor (APS), the next-generation Airborne Particle Sensor (APS2) and the new Auto Multi Sensor (AMS) are available in various wafer shaped form factors depending on the device, including 150mm, 200mm and 300mm wafer sizes. The ReticleSense measurement portfolio including the Airborne Particle Sensor (APSR & APSRQ) and next-generation APS2, the Auto Leveling System (ALSR) and the new Auto Multi Sensor (AMSR) are available in a reticle shaped form factor.

For more information about the entire line of CyberOptics solutions please visit www.cyberoptics.com.

CyberOptics

For more information visit:
http://www.cyberoptics.com

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