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Barrier Properties of an Electroless Deposit of Co-W-P Alloy

Paper explores the copper diffusion barrier provided by a Co-W-P layer, and the diminishment of those properties when cobalt is oxidized. Data demonstrates that higher tungsten content in a Co-W-P deposit suppresses oxidation in an air atmosphere, and quantifies the barrier properties provided by an unoxidized layer of Co-W-P.
Uyemura International Corporation
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