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The revolutionary NanoResolution Multi-Reflection Suppression (MRS) sensor technology identifies and rejects multiple reflections caused by shiny components and mirror-like surfaces.

The NanoResolution MRS sensor enables metrology grade accuracy with superior 100% 3D and 2D inspection performance for attaining repeatable and reproducible measurements faster than alternative technologies – with throughput greater than 25 wafers (300mm) per hour, as compared to current sampling methods.

See how the NanoResolution MRS sensor can inspect and measure features down to 25-microns with high resolution, high accuracy and 2-3X faster than alternate technologies.

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