Visit booth # 2720

Morgan Technical Ceramics (MTC), a leading manufacturer of innovative ceramic, glass, precious metal, piezoelectric and dielectric materials, exhibited its DIAMONEX PHOENIX^® Edge pad conditioner, Pyrolytic Boron Nitride (PBN) and Performance Silicon Carbide (SiC) at booth # 2720 at SEMICON West 2008 held at the Moscone Center, San Francisco, CA, from July 15-17, 2008.

Diamonex Products, a business of MTC, will showcase its newest product, the Phoenix Edge pad conditioner. It produces the highly consistent and fine pad texture required for the advanced process nodes, with significantly higher consistency and smaller asperities than tradition diamond grit and dramatically less wear. This technology can be used in the most demanding chemical mechanical polishing (CMP) applications.

Also on display will be CVD Materials’ Pyrolytic Boron Nitride (PBN) for compound semiconductor manufacturing. Developed through a high temperature chemical vapor deposition process, PBN is a non-toxic, non-wetting material offering intrinsic purity, superior mechanical strength, and thermal stability. PBN does not react with acids, alkalis, organic solvents, molten metals or graphite, and is resistant to thermal shock. PBN-coated graphite heating elements provide extremely uniform temperature profiles for both compound and silicon semiconductor manufacturing.

Additionally, MTC will showcase Performance Silicon Carbide (SiC) which is also available from its CVD Materials’ business. Performance SiC utilizes an advanced manufacturing process in both ultrapure and low electrical resistivity grades, outperforming conventional materials in hostile chemical and plasma environments. The superior properties of Performance SiC – high purity, stiffness, thermal shock resistance and thermal conductivity – make it ideal for a variety of demanding semiconductor processing applications.