At Semicon West To Help Increase Uptime And Improve Wafer Yields In Semiconductor Thermal Processes

DuPont Performance Elastomers will introduce Kalrez® 8900 perfluoroelastomer parts specifically designed for semiconductor thermal processes at Semicon West in San Francisco, July 15-17 at Booth 1807, South Hall. Kalrez® 8900 parts demonstrate longer seal life in higher temperature semiconductor manufacturing processes and help cut costly downtime and reduce cost of ownership.

For static and dynamic sealing applications in thermal processes such as oxidation, diffusion furnace, metal CVD, ALD and LPCVD, Kalrez® 8900 parts offer performance that surpasses typical industry maintenance standards for greater equipment uptime. A combination of properties effectively extends seal life, produces higher quality devices and greater yields. Kalrez® 8900 parts have:

• excellent thermal stability with maximum continuous service temperature of 325°C,
• very low outgassing properties,
• and excellent response to temperature cycling effects.

Kalrez® 8900 parts have been tested in a variety of demanding semiconductor process applications where temperatures routinely rise to above 300°C. Suggested applications include quartz tube seals, plenum seals, chamber seals and center ring seals.

DuPont Performance Elastomers is committed to the global semiconductor market. For more than 75 years, product development and technical expertise have helped introduce a broad product offering across major processes. Kalrez® 8900 parts for aggressive thermal environments complement the company’s offering of its dry-to-wet range of perfluorelastomer parts – Kalrez® 9100, Kalrez® Saharaä 8085, Kalrez® 8002, and Kalrez® 6375UP – successful performers in silicon wafer processing.

DuPont Performance Elastomers also has integrated manufacturing back to the polymer, enhancing quality control and product development. Kalrez® parts are manufactured in ISO 9000 registered facilities and are available in a wide variety of finished products from conventional seal shapes and bonded door seals to custom geometrics. Kalrez® perfluorelastomer parts are specially cleaned and double packaged in Class 100 workstations to significantly reduce the potential for contamination. Each item is individually packaged in a bar-coded bag for full traceability and is available as O-rings, sheets, and custom parts.