• excellent thermal stability with maximum continuous service temperature of 325°C,
• very low outgassing properties,
• and excellent response to temperature cycling effects.

Kalrez® 8900 parts have been tested in a variety of demanding semiconductor process applications where temperatures routinely rise to above 300°C. Suggested applications include quartz tube seals, plenum seals, chamber seals and center ring seals.

“Kalrez® 8900 parts exhibit excellent retention of physical properties at elevated temperatures and have excellent mechanical strength,” says Steve Metaxas, DPE global marketing manager. “They demonstrate a lower total outgassing rate versus competitive products and that helps reduce maintenance costs and allows for greater equipment uptime.”

DuPont Performance Elastomers is committed to the global semiconductor market. For more than 75 years, product development and technical expertise have helped introduce a broad product offering across major processes. Kalrez® 8900 parts for aggressive thermal environments complement the company’s offering of its dry-to-wet range of perfluorelastomer parts – Kalrez® 9100, Kalrez® Saharaä 8085, Kalrez® 8002, and Kalrez® 6375UP – successful performers in silicon wafer processing.

DuPont Performance Elastomers also has integrated manufacturing back to the polymer, enhancing quality control and product development. Kalrez® parts are manufactured in ISO 9000 registered facilities and are available in a wide variety of finished products from conventional seal shapes and bonded door seals to custom geometrics. Kalrez® perfluorelastomer parts are specially cleaned and double packaged in Class 100 workstations to significantly reduce the potential for contamination. Each item is individually packaged in a bar-coded bag for full traceability and is available as O-rings, sheets, and custom parts.