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January 24, 2019

VIEWPOINT 2019: Marco Notarianni, Ph.D., Process Engineering Manager, Plasma-Therm LLC
VIEWPOINT 2019: Marco Notarianni, Ph.D., Process Engineering Manager, Plasma-Therm LLC
Marco Notarianni, Ph.D., Process Engineering Manager, Plasma-Therm LLC
2018 has been a great year for Plasma-Therm in terms of growth overall.

We have expanded our product portfolio with the acquisition of two companies based in France, Corial and Kobus. We are now better equipped to support our European customers with the establishment of our Grenoble operations next door to Soitec and ST.

The Kobus acquisition allows us to offer innovative plasma deposition equipment based on Fast Atomic Sequential Technology (F.A.S.T®), which is a valuable alternative to atomic layer deposition (ALD) as it enables high throughput of conformal films at high aspect ratios. We have since established a Technology Center of Excellence in Deposition at our Grenoble office.

We have cemented our leadership role in serving the R&D and Failure Analysis customers by combining Corial and Advanced Vacuum.

The new facility in Grenoble is also hosting the 300mm Singulator® MDS™ plasma-dicing platform that is part of the EuroPAT MASiP project. A dedicated team of engineers is working on the process integration of this technology for the advanced-packaging market, with the support of our European partners that are part of the project led by Amkor.

In 2018 we also saw significant growth in sales of Odyssey systems, incorporating High Density Radical Flux (HDRF™) technology, which provide economical, low-temperature polymer removal and low-damage surface treatment.

In addition, we received a lot of interest from our current and new customers for the Pinnacle IBE™ and Pinnacle IBD™ Ion Beam Etch and Deposition platforms that are suitable for novel materials and structures.

Our flagship platform, the Versaline®, has also gained many new and repeat orders for a wide range of applications, extending the market dominance of this highly versatile and robust platform for plasma etching and deposition of many varied materials and structures.

We expect to have a busy 2019 as well, as we continue developing technology solutions for our customers, both for the manufacturing of traditional semiconductors and for the creation of novel devices demanded by growing fields that include virtual reality, autonomous vehicles, biometrics, SMART homes and IOT.

Marco Notarianni, Ph.D., Process Engineering Manager
Plasma-Therm LLC