January 28, 2013
Bill Ruff, Vice President -- Marketing, AMETEK Programmable Power
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Bill Ruff, Vice President -- Marketing, AMETEK Programmable Power
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AMETEK Programmable Power has been a key supplier
of precision power supplies to semiconductor tool manufacturers for many years.
Tool manufacturers value our reliability, precision power conversion and
advanced features.
Our products are typically used in ion implantation and plasma
confinement, as well as, more recently in metal organic chemical vapor
deposition (MOCVD), where our Sorensen DC source technology is employed to
drive the tools' heating elements. This
is the manufacturing technology critical to the sector where we're seeing the
most growth, High Brightness LEDs (HBLED). While previously growth in the HBLED
market was driven by LCD monitor and TV backlighting applications, it is
increasingly being driven by solid state lighting (SSL) demand.
As manufacturers aggressively continue lowering the cost of
manufacturing, HBLED based solid state lighting becomes more cost effective
across the spectrum of lighting applications. Current estimates indicate that the HBLED market for SSL applications
will grow in the range of 30% per year.
Our customers, the tool manufacturers, are continually working with
their customers to increase throughput and yields to increase manufacturing
efficiencies and capital utilization. They are increasing the size of the
reactors and adopting "cluster tool" concepts common in silicon processing.
They are also adopting increasingly sophisticated process controls to improve the
deposited thin film consistency and, hence,
device yield.
We work closely with the tool manufacturers to
provide the precision power products they need. In the case of the MOCVD tool manufacturers,
we are providing new power architectures that address the much higher process
power (> 200kW) and power densities inherent in the new reactors and "cluster tool" footprints.
Our recently introduced designs use fully digital
control loop technology to provide precision power control in a process where
process temperature variations of 1°C in a process running at 800°C can impact
the results. In addition, the all
digital architecture provides the ability to monitor and record load parameter
data that can be used for process improvements, troubleshooting and predictive
maintenance ("flight data recorder" function).
Our
semiconductor equipment customers face unique challenges as they pioneer the
technologies that help bring to society the conveniences and quality of life
resulting from modern electronics. We continue to work closely with them to help
power those technologies.
Bill Ruff, Vice President -- Marketing
AMETEK Programmable Power
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